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Silicon Carbide Coarse Lapping Slurry
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Product Overview

When used with a cast-iron lapping plate, SR-3 μm delivers a material removal rate of 1.3–1.5 μm/min and achieves post-lapping surface roughness of Ra ≤ 50 nm, offering 30–40% higher efficiency than comparable domestic products. The slurry residue does not agglomerate, is easy to clean, and produces scratch-free surfaces.

When used with a polyurethane polishing pad, PDRB-20 μm enables high removal rates, clean processing, easy cleanup, and reduced wafer breakage. It forms a shallower surface damage layer than cast-iron plate lapping, while maintaining comparable TTV, warp, and bow performance.


Parameter

Model

Particle

Size/μm

Appearance

Compatible

Plate/Pad

Surface Roughness

Ra/nm

pH ValueStorageStability
SR-3μm3-5

Gray-white

slurry

Cast iron

lapping plat

507.0-8.5

Stable for

1 year

PDRB-20μm18-30

Dark gray

slurry

Polyurethane

polishing pad

22.17.0-8.5

Stable for

1 year



Application

  • Silicon Carbide Coarse Lapping Slurry
    Silicon Carbide Coarse Lapping Slurry

    Phone:0371-67770128 / 67770131

    Sales divison:sales@famous-cn.com 

    Technical service:service@famous-cn.com

    Address: Room 2313, Lujin Building, No.14 CBD Outer Ring Road, Zhengdong New District, Zhengzhou City

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