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Silicon Carbide Coarse Lapping Slurry

Product Overview

When used with a cast-iron lapping plate, SR-3 μm delivers a material removal rate of 1.3–1.5 μm/min and achieves post-lapping surface roughness of Ra ≤ 50 nm, offering 30–40% higher efficiency than comparable domestic products. The slurry residue does not agglomerate, is easy to clean, and produces scratch-free surfaces.

When used with a polyurethane polishing pad, PDRB-20 μm enables high removal rates, clean processing, easy cleanup, and reduced wafer breakage. It forms a shallower surface damage layer than cast-iron plate lapping, while maintaining comparable TTV, warp, and bow performance.


Parameter

ModelParticle Size/μmAppearanceCompatiblePlate/PadSurface Roughness Ra/nmpH ValueStorageStability
SR-3μm3-5

Gray-white

slurr

Cast iron

lapping plat

507.0-8.5Stable for 1 year
PDRB-20μm18-30

Dark gray

slurry

Polyurethane

polishing pad

22.17.0-8.5Stable for 1 year




Application

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