
Product Overview
When used with a cast-iron lapping plate, SR-3 μm delivers a material removal rate of 1.3–1.5 μm/min and achieves post-lapping surface roughness of Ra ≤ 50 nm, offering 30–40% higher efficiency than comparable domestic products. The slurry residue does not agglomerate, is easy to clean, and produces scratch-free surfaces.
When used with a polyurethane polishing pad, PDRB-20 μm enables high removal rates, clean processing, easy cleanup, and reduced wafer breakage. It forms a shallower surface damage layer than cast-iron plate lapping, while maintaining comparable TTV, warp, and bow performance.

Parameter
| Model | Particle Size/μm | Appearance | CompatiblePlate/Pad | Surface Roughness Ra/nm | pH Value | StorageStability |
| SR-3μm | 3-5 | Gray-white slurr | Cast iron lapping plat | 50 | 7.0-8.5 | Stable for 1 year |
| PDRB-20μm | 18-30 | Dark gray slurry | Polyurethane polishing pad | 22.1 | 7.0-8.5 | Stable for 1 year |

Application
