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Sapphire Fine Lapping Slurry

Product Overview

PDFA-3 μm is suitable for copper-plate polishing of sapphire substrates under high-pressure single-side processing. It delivers stable performance, high polishing efficiency, excellent surface roughness, and a shallow surface damage layer after copper polishing.

PDRB-25 μm is designed for double-side fine lapping of sapphire window wafers. When used with a polyurethane polishing pad, it provides high removal rate, environmentally friendly processing, easy cleanup, reduced wafer breakage, a shallow surface damage layer, and high precision in surface profile and TTV.


Parameter

ModelParticle Size/μmAppearanceCompatible Plate /PadPH ValueStorage Stability
PDFA-3μm3-5Light yellow liquidResin-copper lappingplate10.0-11.0Stable for 1 year
PDRB-25μm18-30Dark gray slurry

Polyurethane polishing pad

7-8.5Stable for 1 year


Application

Phone:0371-67770128 / 67770131

Sales divison:sales@famous-cn.com 

Technical service:service@famous-cn.com

Address: Room 2313, Lujin Building, No.14 CBD Outer Ring Road, Zhengdong New District, Zhengzhou City

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